>>>>>型號(hào):V18345-1010521001 微傳感器
【功能描述】
V18345-1010521001 微傳感器
微傳感器的特征之一是體積小，其敏感元件的尺寸一般為微米級(jí)。是由微機(jī)械加工技術(shù)制作而成的，包括光刻、腐蝕、淀積、
鍵合和封裝等工藝。利用其中的各向異性腐蝕、犧牲層技術(shù)LIGA工藝，可以制造出層與層間有很大差別的三維微結(jié)構(gòu)。
包括可活動(dòng)的膜片、懸臂梁、橋以及凹槽、孔隙、錐體等。
這些微結(jié)構(gòu)與特殊用途的薄膜和高性能的集成電路相結(jié)合，已成功地用于制造各種微傳感器乃至多功能的敏感元件陣列，
實(shí)現(xiàn)了諸如壓力、力、加速度、角速率、應(yīng)力、應(yīng)變、溫度、流量、成像、磁場(chǎng)、濕度、PH值、氣體成分、離子和分子濃度以及生物傳感器等。
>>>>>型號(hào):V18345-1010521001 微傳感器
【英文介紹】
V18345-1010521001 Microsensor
One of the characteristics of microsensors is their small size, and the size of their sensitive elements is generally micron. It is manufactured by micromachining technology, including lithography, corrosion, deposition, bonding and packaging processes. Using the anisotropic corrosion and sacrificial layer technology LIGA process, 3D microstructures with great differences between layers can be fabricated.
Including movable diaphragm, cantilever beam, bridge as well as grooves, pores, cones, etc.
These microstructures, in combination with special-purpose films and high-performance integrated circuits, have been successfully used to fabricate a wide range of microsensors and even multifunctional sensitive element arrays for applications such as pressure, force, acceleration, angular rate, stress, strain, temperature, flow, imaging, magnetic field, humidity, PH, gas composition, ion and molecular concentrations, and biosensors.
>>>>>型號(hào):V18345-1010521001 微傳感器
